There are several types of micro vacuum pumps, including:

1. Diaphragm pumps: These pumps use a flexible diaphragm to create a vacuum. They are often small, lightweight, and suitable for low to medium vacuum applications.

2. Piston pumps: Piston pumps operate by reciprocating a piston to generate a vacuum. They can provide higher vacuum levels and are commonly used in laboratory and industrial settings.

3. Rotary vane pumps: Rotary vane pumps use rotating vanes to create a vacuum. They are capable of achieving relatively high vacuum levels and are often used in vacuum systems.

4. Turbomolecular pumps: Turbomolecular pumps use high-speed rotating blades to achieve very high vacuum levels. They are typically used in applications requiring ultra-high vacuum.

5. Ion pumps: Ion pumps use ionization of gas molecules to create a vacuum. They are often used in high-vacuum applications where extremely low pressures are required.

6. Screw pumps: Screw pumps use two intermeshing screws to create a vacuum. They are suitable for medium to high vacuum applications and offer relatively high pumping speeds.

7. Peristaltic pumps: Peristaltic pumps use a flexible tube and rollers to generate a vacuum. They are often used for low-flow and precise vacuum applications.

 

The choice of micro vacuum pump depends on the specific requirements of the application, such as vacuum level, flow rate, size, and portability. It is important to consider these factors when selecting the appropriate pump for a particular task.